The Story
HaloVac oils have been specially developed by Halocarbon Products to meet the needs of the industry for inert, nonflammable and hydrogen free vacuum pump oils. These inert oils can be used for either plasma etching (PE) or low-pressure chemical vapor deposition (LPCVD). HaloVac oils are safe to use with oxygen and other aggressive chemicals.
Specifications – HaloVac 190
|
Vapor Pressure at 25ºC (torr) |
4.3x10-5 |
|
Viscosity at 40ºC (cSt) |
155 |
|
Boiling Range (ºC) |
>260 |
|
Pour Point (ºC) |
-9 |
|
Flash Point |
None |
|
Fire Point |
None |
|
Density (g/cm3) |
1.92 |
Description
HaloVac oils have been specially developed by Halocarbon Products to meet the needs of the industry for inert, nonflammable and hydrogen free vacuum pump oils. These inert oils can be used for either plasma etching (PE) or low-pressure chemical vapor deposition (LPCVD). HaloVac oils are safe to use with oxygen and other aggressive chemicals.
Specifications – HaloVac 190
|
Vapor Pressure at 25ºC (torr) |
4.3x10-5 |
|
Viscosity at 40ºC (cSt) |
155 |
|
Boiling Range (ºC) |
>260 |
|
Pour Point (ºC) |
-9 |
|
Flash Point |
None |
|
Fire Point |
None |
|
Density (g/cm3) |
1.92 |
