TMC-3283 ELECTRONIC LIQUID

TMC-3283 Electronic Liquid is a clear, colorless, thermally stable, fully fluorinated liquid, ideal for use in many single-phase heat transfer applications in the semiconductor manufacturing industry. This makes it an ideal heat transfer fluid for etchers, ion implanters, testers, and others.

TMC-3283 is primarily a single compound; its composition will not shift or fractionate with time. This keeps fluid loss to a minimum and insures that heat transfer properties will not change with time.

 

APPLICATIONS

• Heat Transfer 
• Dielectric Bath
  
• Electronics
• Semiconductor Manufacturing

 

PHYSICAL PROPERTIES COMPARISON

PROPERTY	UNITS	3M™ FC-3283	TMC-3283	TMC-3283E	FC-3283 Reclaimed
Type		Legacy	Virgin Replacement	Virgin Equivalent	Reclaimed
Form		Liquid	Liquid	Liquid	Liquid
Color		Colorless	Colorless	Colorless	Colorless
Odor		Odorless	Odorless	Odorless	Odorless
Boiling Point	°C	128	128	128	128
Pour Point	°C	-65	-65	-65	-65
Density	kg/m3	1820	1820	1830	1820
Kinematic Viscosity	cSt	0.75	0.75	1.9	0.75
Vapor Pressure	kPa	1.2	1.2	3.46	1.2
Specific Heat	J/kg-K	1100	1100	1431	1100
Latent Heat of Vaporization	J/g	78	78	136	78
Coefficient of Thermal Expansion	1/°C	0.0014	0.0014	0.0013	0.0014
Thermal Conductivity	W/m-K	0.066	0.066	0.0834	0.066
Dielectric Strength	kV	>40	>40	44	>40
Electrical Resistivity	Ohm-cm	1015	1015	1012	1015
Average Molecular Weight	g/mol	521	521	500	521
Water Solubility	ppmw	7	7	20	7
Ozone Depletion Potential (ODP)		0	0	0	0
Global Warming Potential (GWP)		>5000	>5000	118	>5000

Not for specification purposes.  All values @25°C unless otherwise specified.

 

PERFORMANCE

 

PROPERTY	METHOD	TEMPERATURE	RESULT
Boiling Point °C	OECD TG 103	--	127°C
Pour Point °C	ASTM D-97	--	<-50°C
Dielectric Strength, 0.1’’ gap	ASTM D-877	20°C	43.1KV
		60°C	42.3KV
Viscosity (cSt)  (-20°C~80°C)	ASTM D-445	-20°C	2.76
		-10°C	1.98
		0°C	1.65
		10°C	1.35
		20°C	0.94
		30°C	0.76
		40°C	0.65
		50°C	0.54
		60°C	0.47
		70°C	0.44
		80°C	0.40
Vapor Pressure (kPa) °C	ASTM D-323	25°C	1.4
		60°C	7.1
		80°C	12.6

 

MATERIAL COMPATIBILITY

TMC-3283 is compatible with most metals, plastics, and elastomers.

 

COMPLIANCE

• Listed on U.S. Toxic Substances Control Act (TSCA) Inventory.
• Not subject to SARA Title III (EPCRA) reporting regulations.
• Complies with EU RoHS Directive (EU) 2015/863 amending Annex II to Directive 2011/65/EU
• Complies with EU regulation 1907/2006 REACH.

 

PACKAGING

• Jug (11lb/55kg)
• Pail (44lb/20kg)
• Drum (551lb/250kg)
• Tote - Available Upon Request

 

SHELF LIFE & STORAGE

Shelf life is 60 months from the date of manufacture when stored in the original packaging materials and stored under normal conditions.  TMC will re-certify material every 5 years up to 20 years.  

DISPOSAL AND RECYCLING

This fluid can be recycled and reused.  Help protect the environment, and don't pay for expensive disposal services.  TMC Industries can reclaim your used fluorinated fluids, restoring them to like-new condition, and save you up to 50% in replacement fluids while protecting the environment, or TMC will recycle your fluid free of charge (conditions apply).

TMC Reclaimed Fluids are tested to meet new product specifications.  It will be clear and odorless, and a Certificate of Analysis is issued with every order.

TMC Industries offers a 100% satisfaction guarantee on all of our reclaimed fluids.  We back this up with a no questions asked refund policy.  To learn more, click HERE.

 

DOCUMENTS

TMC Performance Fluids Brochure

TMC Used Fluid Reclamation Service Brochure